Optical absorption filter for an integrated device
Apparatus and methods relating to attenuating excitation radiation incident on a sensor (1-122) in an integrated device that is used for sample analysis are described. At least one semiconductor film (1-336) of a selected material and crystal morphology is located between a waveguide (1-115) and a s...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Apparatus and methods relating to attenuating excitation radiation incident on a sensor (1-122) in an integrated device that is used for sample analysis are described. At least one semiconductor film (1-336) of a selected material and crystal morphology is located between a waveguide (1-115) and a sensor (1-122) in an integrated device that is formed on a substrate (1-105). Rejection ratios greater than 100 or more can be obtained for excitation and emission wavelengths that are 40 nm apart for a single layer of semiconductor material (1-135). |
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