SCANNING SYSTEM FOR ELECTRON BEAM MACHINING EQUIPMENT
Abstract The present invention discloses a scanning system for electron beam machining equipment, comprising a central controller, a drive power supply, an impedance balance network and a scanning device, wherein the central controller generates two-phase synchronous control voltage signals, which a...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Abstract The present invention discloses a scanning system for electron beam machining equipment, comprising a central controller, a drive power supply, an impedance balance network and a scanning device, wherein the central controller generates two-phase synchronous control voltage signals, which are respectively input into the drive power supply; and the output current of the drive power supply is sent to a winding of the scanning device through the impedance balance network. In the present invention, an impedance balance network circuit is serially connected in a winding loop of the scanning device, which can reduce the low-frequency power consumption of Class AB power amplifier circuits, and expand the operating bandwidth of the magnetic scanning device. Drawings of Description 12 3 -4 Fig.1I +V RI R3 + DEl 31 41 ( 777 --- -0± -0J Fig. 2 I~~~ (Hz) II 0.0 0. 1 1 I' to to000 I I I F i 3 |
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