A MEMS miniaturized solenoid transformer and its manufacturing method

In the MEMS miniature solenoid transform, a silicon substrate, a soft magnetic core, a first solenoid and a second solenoid are disposed, and the soft magnet core is wrapped inside the silicon substrate. The silicon substrate is disposed with a first spiral channel and a second spiral channel, and t...

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Bibliographische Detailangaben

Hauptverfasser:	Xia, Jingchao, Zhu, Kaiyun, Sun, Jiamian, Li, Haiwang, Xu, Tiantong, Wu, Hanxiao, Tao, Zhi, Huang, Yujia
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDUCTANCES MAGNETS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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