A MEMS miniaturized solenoid transformer and its manufacturing method

In the MEMS miniature solenoid transform, a silicon substrate, a soft magnetic core, a first solenoid and a second solenoid are disposed, and the soft magnet core is wrapped inside the silicon substrate. The silicon substrate is disposed with a first spiral channel and a second spiral channel, and the soft magnetic core passes through the centers of the first and second spiral channels, a first solenoid and a second solenoid are disposed in the first helical channel and the second helical channel. In this manufacture method, an upper silicon substrate and a lower silicon substrate are made; an upper iron core and a low iron core are formed by electroplating; A first helical channel and a second helical channel are formed, and a first solenoid and second solenoid are electroplated. In this invention, the soft magnetic iron core, the first solenoid and the second solenoid are arranged inside the silicon substrate, so that the cross-sectional area of the transformer winding can be increased, the magnetic flux is higher, with high inductance value; The silicon substrate protect the soft magnetic iron core, the first solenoid and the second solenoid, which improves the strength of the transform, and has good impact resistance. Figure 1 Figure 2