ELECTROMAGNETIC CASTING APPARATUS FOR SILICON

Abstract This invention aims at providing a silicon electromagnetic casting apparatus for accurate and easy manufacturing of high quality silicon ingots. This apparatus uses a furnace vessel 100, a conductive crucible 200 installed in the internal part of the furnace vessel 100 and an induction coil 300 installed on the outer circumference of the crucible 200. Constant pressure is maintained in the internal part of the furnace vessel 100 using a prescribed gas and the silicon inside the above mentioned crucible 200 is solidified after melting it by induction heating by applying voltage on the induction coil 300. The induction coil 300 is made by placing 2 induction coils 310 and 320 having different induction frequencies one above the other. 11 ,0 --100 ___ 310~ S. 'i~7 F320) --- 120 400 f 140- 50 1- - - --- 130a Fig. 1