Beam processing device

A beam processing device (10) that irradiates the processing surface of a work (W) with a beam (LB) and processes the processing surface comprises the following: a power source (32) for emitting the beam (LB); a beam moving means (12) for moving the beam (LB) emitted from the power source (32); and...

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1. Verfasser: KONDO, KIYOYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:A beam processing device (10) that irradiates the processing surface of a work (W) with a beam (LB) and processes the processing surface comprises the following: a power source (32) for emitting the beam (LB); a beam moving means (12) for moving the beam (LB) emitted from the power source (32); and a plurality of reflectors (14) that are disposed in the light path of the beam (LB) between the beam moving means (12) and the processing surface and that reflect the beam (LB) moved by the beam moving means (12) and guide the beam (LB) to the processing surface. The inclination angles of the plurality of reflectors (14) are set in accordance with the incident direction of the beam (LB) so that the beam (LB) moved by the beam moving means (12) becomes substantially perpendicular to a different position of the processing surface.