Integrated circuit and method for manufacturing

A method of forming a semiconductor device, the method including forming a substrate including a first surface having a non-doped region, forming an insulative material over the first surface of the substrate, forming a first conductive material over the first insulative material, forming an opening...

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Bibliographische Detailangaben
Hauptverfasser: FRANK R. BRYANT, DENNIS W. TOM, S. JONATHAN WANG, TERRY E. MCMAHON, GREGORY T. HINDMAN, RICHARD TODD MILLER, SIMON DODD
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of forming a semiconductor device, the method including forming a substrate including a first surface having a non-doped region, forming an insulative material over the first surface of the substrate, forming a first conductive material over the first insulative material, forming an opening in the first conductive material that forms a path to the substrate that is substantially free of the first conductive material and the first insulative material, forming a second insulative material over the first conductive material, and forming a second conductive material over the second insulative material, wherein the second conductive material is formed in the opening and contacts the non-doped region of the substrate.