Microwave resonator, modular process chain made from one such microwave resonator, operational method and objects/work pieces thermally processed by microwaves according to said method

In an even numbered polygonal microwave resonator wherein a high mode microwave mode is formed and in the resonator volume a homogeneous field distribution is established for the thermal processing of workpieces, a microwave in-coupling structure pair is provided along a joining edge of two wall seg...

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Bibliographische Detailangaben
Hauptverfasser: VOLKER NUSS, ANDREAS FLACH, THOMAS SEITZ, LAMBERT FEHER
Format: Patent
Sprache:eng
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Zusammenfassung:In an even numbered polygonal microwave resonator wherein a high mode microwave mode is formed and in the resonator volume a homogeneous field distribution is established for the thermal processing of workpieces, a microwave in-coupling structure pair is provided along a joining edge of two wall segments alternately at opposite sides and the in-coupling structure pairs or in communication, via a rectangular microwave guide channel, with a microwave sources supplying microwaves to the in-coupling structure pairs so that the microwaves entering the resonator from each in-coupling structure are directed toward an opposite corner area of the resonator and are reflected from the opposite corner area back into the center area of the resonator in the form of separate beams.