MICRO ELECTRO-MECHANICAL SYSTEM WITH ONE OR MORE MOVING PARTS METHOD AND APPARATUS

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Bibliographische Detailangaben
Hauptverfasser:	MANES, ELIACIN, SPENCER, A. LANE, KRISHNA, JONNALAGADDA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS RELAYS SELECTORS TRANSPORTING
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