METHOD FOR REDUCING DATA STORAGE REQUIREMENTS FOR DEFECTS IDENTIFIED ON SEMICONDUCTOR WAFERS

METHOD FOR REDUCING DATA STORAGE REQUIREMENTS FOR DEFECTS IDENTIFIED ON SEMICONDUCTOR WAFERS

A method for reducing data storage requirements for defects identified on one or more related semiconductor wafers is described. The method includes: receiving images of one or more related semiconductor wafers; identifying defects on the one or more related semiconductor wafers by comparing the rec...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: YERVANT, D. LEPEJIAN
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Beschreibung
Zusammenfassung:A method for reducing data storage requirements for defects identified on one or more related semiconductor wafers is described. The method includes: receiving images of one or more related semiconductor wafers; identifying defects on the one or more related semiconductor wafers by comparing the received images with corresponding images of a model semiconductor wafer having an identical integrated circuit design as the one or more related semiconductor wafers; and compressing information of the identified defects for data storage.