MICROSTRUCTURES

A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to r...

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Bibliographische Detailangaben
Hauptverfasser: URS, T. DURIG, GRAHAM CROSS, RETO SCHLITTLER, MICHEL DESPONT, PETER VETTIGER, GREGOIRE GENOLET
Format: Patent
Sprache:eng
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Zusammenfassung:A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.