Thermal infrared detector

Thermal infrared detector

A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: C. JEFFREY BRINKER, ROBERT W. SCHWARTZ, WILLIAM L WARREN, BRUCE A TUTTLE, JUDITH A. RUFFNER, PAUL G. CLEM, JEFFREY A. BULLINGTON
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr0.4Ti0.6)O3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550 DEG C.