VERFAHREN ZUM FÖRDERN EINES FLUIDS UND MIKROPUMPE HIERFÜR

A device includes a number of N 2 pump chambers having N separate chamber volumes, each of which may be altered independently of the other(s). The volume changes of the pump chambers occur periodically with substantially the same frequency (f). The device further includes N actuators for changing the respective chamber volumes and valves for establishing the pumping direction, and finally a common inlet and outlet. The pump chambers of the device are disposed in series one behind the other, and the forms of the periods of volume changes of all pump chambers are substantially identical. Moreover, an ideal phase offset PHI of approximately 180° exists between the volume change of the chamber volumes of two sequential pump chambers.