SYSTEM ZUM MODIFIZIEREN KLEINER STRUKTUREN

A charge transfer mechanism is used to locally deposit material or remove material to alter for a small structure, such as a part of an integrated circuit (114, 1100). A local electrochemical cell (110) is created without having to immerse the entire work piece in a bath. The charge transfer mechani...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GANNON, THOMAS J, BASSOM, NEIL J, GU, GEORGE Y, LIU, KUN
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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