SYSTEM ZUM MODIFIZIEREN KLEINER STRUKTUREN

SYSTEM ZUM MODIFIZIEREN KLEINER STRUKTUREN

A charge transfer mechanism is used to locally deposit material or remove material to alter for a small structure, such as a part of an integrated circuit (114, 1100). A local electrochemical cell (110) is created without having to immerse the entire work piece in a bath. The charge transfer mechani...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GANNON, THOMAS J, BASSOM, NEIL J, GU, GEORGE Y, LIU, KUN
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A charge transfer mechanism is used to locally deposit material or remove material to alter for a small structure, such as a part of an integrated circuit (114, 1100). A local electrochemical cell (110) is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam (702, 802, 902) or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber (700).