METHODE ZUR STEUERUNG DES HERSTELLUNGSVERFAHRENS EINER PHOTOELEKTRISCHEN UMWANDLUNGSVORRICHTUNG

METHODE ZUR STEUERUNG DES HERSTELLUNGSVERFAHRENS EINER PHOTOELEKTRISCHEN UMWANDLUNGSVORRICHTUNG

Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark (3) for controlling the manufacturing process in a peripheral region (2) on a surface of a transparent substrate or in that region of a side surface of the transparent subs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HIRAISHI, MASAFUMI, SAWAI, KAZUNORI
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark (3) for controlling the manufacturing process in a peripheral region (2) on a surface of a transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of a transparent electrode layer, a semiconductor layer and a reverse electrode layer, the mark (3) being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.