SILIZIUMRESONATOR DES STIMMGABELTYPS

SILIZIUMRESONATOR DES STIMMGABELTYPS

The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BOURGEOIS, CLAUDE, RUFFIEUX, DAVID, DUBOIS, MARC-ALEXANDRE, BABOROWSKI, JACEK
Format: Patent
Sprache:ger
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.