VORRICHTUNG ZUR BEWEGUNG VON EINBAUTEILEN IN VAKUUMANLAGEN

A device for moving components inside vacuum units comprises a housing with an inner space with gas-tight connection to the vacuum unit and holding components which are magnetic or joined to magnets. A separated outer space contains magnets whose movement moves the inner components by non-contacting...

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Bibliographische Detailangaben
Hauptverfasser: GOEDSCHE, THOMAS, LINDACKERS, DIRK
Format: Patent
Sprache:ger
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Zusammenfassung:A device for moving components inside vacuum units comprises a housing with an inner space with gas-tight connection to the vacuum unit and holding components which are magnetic or joined to magnets. A separated outer space contains magnets whose movement moves the inner components by non-contacting force.