SPRUDELZYLINDER UND TAUCHROHRGEFAESS

@ An all welded square bottomed stainless steel cylinder and dip tube device (10), for transferring, by vapor deposition, very reactive electronic grade organometallic liquid (52) to a deposition system, includes a top fill opening (42) and inlet and outlet diaphragm valves (14, 16) and is provided...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: O'GRADY, JOHN W., JR, MELAS, ANDREAS A
Format: Patent
Sprache:eng ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:@ An all welded square bottomed stainless steel cylinder and dip tube device (10), for transferring, by vapor deposition, very reactive electronic grade organometallic liquid (52) to a deposition system, includes a top fill opening (42) and inlet and outlet diaphragm valves (14, 16) and is provided with an internal coating (100) of PVF Teflon to several thousandths of an inch thickness. Contamination of the liquid (52) is eliminated or at least substantially minimized since the device (10) is stable in an upright position, the diaphragm valves (14, 16) each have a very small and inert area exposed to the liquid, and the coating (100) serves as a barrier to contamination of the liquid by the metal of which the cylinder (18, 20) and dip tube (28) are made.