VORRICHTUNG ZUM TRANSPORTIEREN UND BESTÜCKEN VON SUBSTRATEN MIT HALBLEITERSCHIPS

The substrate conveying apparatus has a rectangular channel (3) with two side walls (4,5) and a driving mechanism for actuating a comb for feeding the substrate (1) through the channel in a transport direction (X). The substrate is pressed by a resiliently mounted ball (11).

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Bibliographische Detailangaben
Hauptverfasser:	SUTER, GUIDO, KELLENBERGER, DANIEL
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The substrate conveying apparatus has a rectangular channel (3) with two side walls (4,5) and a driving mechanism for actuating a comb for feeding the substrate (1) through the channel in a transport direction (X). The substrate is pressed by a resiliently mounted ball (11).