KAPAZITIVER DRUCKSENSOR
Disclosed is a capacitive pressure sensor (1) comprising a base element (10), one side of which is provided with a supporting membrane bed (11) having a concave central area, and a membrane (17) that is connected in a pressure-proof manner to the base element along a joining location, said membrane...
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Zusammenfassung: | Disclosed is a capacitive pressure sensor (1) comprising a base element (10), one side of which is provided with a supporting membrane bed (11) having a concave central area, and a membrane (17) that is connected in a pressure-proof manner to the base element along a joining location, said membrane (17) covering the membrane bed 11. A measuring electrode (13) is disposed in the central area. A reference electrode (14) is arranged in a ditch (12) in order to increase the distance to a counter-electrode (18) on the membrane (17), which makes the reference capacity between the reference electrode and the counter-electrode less sensitive to pressure-related excursions of the membrane (17), resulting in an increased sensitivity of the pressure sensor. |
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