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The invention relates to an electric arc evaporator comprising an anode, a target (14) in the form of a cathode, a voltage source which is connected to the anode and the cathode and is used to generate an electric arc spot on the target surface (16), and a magnet arrangement (66) which is situated b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	CURTINS, HERMANN
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention relates to an electric arc evaporator comprising an anode, a target (14) in the form of a cathode, a voltage source which is connected to the anode and the cathode and is used to generate an electric arc spot on the target surface (16), and a magnet arrangement (66) which is situated beneath the target, comprises an inner and an outer ring coil (70, 72) and is used to produce a magnetic field influencing an electric arc movement on the target surface. The aim of the invention is to displace the electric arc on defined paths over large areas of the target surface. To this end, an element (74, 76) having high relative magnetic permeability (mur>>1) and influencing the magnetic field of the ring coil in the region of the surface (16) of the target is associated to at least one of the ring coils (70, 72) of the magnet arrangement (66).