METHODE UND VORRICHTUNG ZUR EICHUNG EINES INFRAROT-PYROMETERS IN EINER WÄRMEBEHANDLUNGSANLAGE

METHODE UND VORRICHTUNG ZUR EICHUNG EINES INFRAROT-PYROMETERS IN EINER WÄRMEBEHANDLUNGSANLAGE

A calibration instrument (100) for calibrating a temperature probe (40, 50), such as pyrometer, uses a stable light source (115), such as a light emitting diode, to simulate a blackbody of a known temperature. The light source (115) is located inside a chamber and emits light through an aperture (11...

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Bibliographische Detailangaben
1. Verfasser: YAM, MARK
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
RADIATION PYROMETRY
SEMICONDUCTOR DEVICES
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:A calibration instrument (100) for calibrating a temperature probe (40, 50), such as pyrometer, uses a stable light source (115), such as a light emitting diode, to simulate a blackbody of a known temperature. The light source (115) is located inside a chamber and emits light through an aperture (110). The calibration instrument (100) may be inserted into a thermal processing chamber, or the temperature probe may be removed from the chamber. An alignment tool (149) aligns the aperture (110) to the input of the temperature probe (40, 50). The calibration instrument may be integrated with the alignment tool, or it may be removable.