DISTANZSTÜCK-MASKE FÜR PLÄTTCHEN AUF EINER SUBSTRATTRÄGER-SPANNVORRICHTUNG UND HERSTELLUNGSVERFAHREN DAFÜR

An apparatus for supporting a workpiece (116) spaced from a support surface (102) of a support chuck (104) comprises a spacing mask (100) made of metal on the support surface. Also claimed is a method of making a wafer spacing mask comprising depositing a metallic material in a pre-defined pattern o...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SUGARMAN, MICHAEL N, GRUNES, HOWARD E, BURKHART, VINCENT E
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An apparatus for supporting a workpiece (116) spaced from a support surface (102) of a support chuck (104) comprises a spacing mask (100) made of metal on the support surface. Also claimed is a method of making a wafer spacing mask comprising depositing a metallic material in a pre-defined pattern over a support surface of the chuck support member.