THERMISCH HÄRTBARE ANTIREFLEXIONS BESCHICHTUNGEN UND VERFAHREN ZUR HERSTELLUNG DERSELBEN

A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oli...

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Bibliographische Detailangaben
Hauptverfasser: FLAIM, TONY D, MEADOR, JIM D, BREWER, TERRY L, SHAO, XIE
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.