VERFAHREN UND INTERFERENZMIKROSKOP ZUM MIKROSKOPIEREN EINES OBJEKTES ZUR ERZIELUNG EINER AUFLÖSUNG JENSEITS DER BEUGUNGSGRENZE

PCT No. PCT/DE95/01073 Sec. 371 Date Feb. 19, 1997 Sec. 102(e) Date Feb. 19, 1997 PCT Filed Aug. 16, 1995 PCT Pub. No. WO96/06324 PCT Pub. Date Feb. 29, 1996The invention relates to a method for microscoping an object with a (phase-measurement) interference microscope with extremely high resolution, in which the light beam of a light source is divided into at least two coherent part beams, of which at least one serves for illuminating the object, and whereby the part beams are interferingly combined again and supplied to an interference figure detector screened into image zones, for achieving a resolution beyond the diffraction limit. Furthermore, the invention relates to an interference microscope, preferably for carrying out the above method. The method according to the invention is characterized in that by means of a zooming system with adjustable enlargement, said system being connected upstream of the interference figure detector, an enlargement is adjusted by which the location uncertainty to be determined is allocated to a part zone of an image zone of the detector screen by using for the zoom adjustment through a feedback the image information of the interference figure detector of at least one preceding picture recording on the basis of a phase image computed therefrom.