INTELLIGENTER OPTISCHER SENSOR FÜR OPTISCHE NAHFELDVORRICHTUNG

PCT No. PCT/GB94/01586 Sec. 371 Date Feb. 23, 1996 Sec. 102(e) Date Feb. 23, 1996 PCT Filed Jul. 22, 1994 PCT Pub. No. WO95/03561 PCT Pub. Date Feb. 2, 1995The disclosed optical device includes a probe which is integrally supported on a cantilever which defines an optical path extending to an extern...

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Bibliographische Detailangaben
Hauptverfasser:	CASTAGNE, MICHEL, BONNAFE, JACQUES, FILLARD, JEAN, PIERRE
Format:	Patent
Sprache:	ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING TRANSPORTING
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Zusammenfassung:	PCT No. PCT/GB94/01586 Sec. 371 Date Feb. 23, 1996 Sec. 102(e) Date Feb. 23, 1996 PCT Filed Jul. 22, 1994 PCT Pub. No. WO95/03561 PCT Pub. Date Feb. 2, 1995The disclosed optical device includes a probe which is integrally supported on a cantilever which defines an optical path extending to an external device which may carry an optical processor. In a preferred embodiment the device has an optical path which is capable of guiding an evanescent wave to the external device. The device overcomes a problem with prior art Scanning Tunnelling Microscopes in that, by utilizing evanescent waves, it enables access to the so called mesoscopic range between approximately 1x10-10m