EINRICHTUNG ZUM OPTISCHEN ABTASTEN EINER OBERFLÄCHE
An optical-strength element, elongated in a direction transverse to the radiation beam at the location where the beam impinges on the element, directs the portion of the beam entering the objective system in a direction parallel to the entry axis of the objective system. A scanning element causes th...
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Sprache: | ger |
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Zusammenfassung: | An optical-strength element, elongated in a direction transverse to the radiation beam at the location where the beam impinges on the element, directs the portion of the beam entering the objective system in a direction parallel to the entry axis of the objective system. A scanning element causes the radiation beam to scan along the length of the element as the objective system is moved along its stroke, thereby moving the focussed spot of the beam along the surface to be optically scanned. |
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