Intrinsically Stretchable Biphasic (Solid–Liquid) Thin Metal Films

Intrinsically Stretchable Biphasic (Solid–Liquid) Thin Metal Films

Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography-compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq−1) and large stretchability (400%). This novel approach to deposit and...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Hirsch, Arthur Edouard, Michaud, Hadrien Olivier, Gerratt, Aaron Powers, De Mulatier, Séverine, Lacour, Stéphanie
Format: Web Resource
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography-compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq−1) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.
DOI:10.1002/adma.201506234