Silicon based micro-optical collimating element for mid-infrared Quantum Cascade Lasers

Silicon based micro-optical collimating element for mid-infrared Quantum Cascade Lasers

A realization of a high numeric aperture, aspheric, silicon based collimating element for the mid-infrared (4 – 14 microns) Quantum Cascade Lasers, suited for mass production using computer driven reactive ion etching is presented.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Hvozdara, Lubos, Logean, Eric, Di Francesco, Joab, Herzig, Hans Peter, Völkel, Reinhard, Eisner, Martin, Baroni, Pierre-Yves, Rochat, Michel, Muller, Antoine
Format: Web Resource
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A realization of a high numeric aperture, aspheric, silicon based collimating element for the mid-infrared (4 – 14 microns) Quantum Cascade Lasers, suited for mass production using computer driven reactive ion etching is presented.