10 - Reliability of RF MEMS
After a brief overview of possible failure mechanisms and failure defects that can occur in radio frequency microelectromechanical systems (RF MEMS), this chapter focuses on three specific reliability issues: charging, because it remains the most important problem for capacitive RF MEMS; electrostat...
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Format: | Buchkapitel |
Sprache: | eng |
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Zusammenfassung: | After a brief overview of possible failure mechanisms and failure defects that can occur in radio frequency microelectromechanical systems (RF MEMS), this chapter focuses on three specific reliability issues: charging, because it remains the most important problem for capacitive RF MEMS; electrostatic discharge, because it is less known as a possible failure cause for MEMS; and package hermeticity, because this is an often underestimated problem for RF MEMS. |
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DOI: | 10.1533/9780857098610.1.291 |