Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer
This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as...
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| creator | Hudson, Tracy D Kranz, Michael S |
| description | This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor.
Prepared in collaboration with ENGeniusMicro, LLC, Huntsville, AL. The original document contains color images. |
| format | Report |
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Prepared in collaboration with ENGeniusMicro, LLC, Huntsville, AL. The original document contains color images.</description><subject>ACCELEROMETERS</subject><subject>DETECTORS</subject><subject>GYROSCOPES</subject><subject>INERTIAL TECHNOLOGY</subject><subject>MICROELECTROMECHANICAL SYSTEMS</subject><subject>Navigation and Guidance</subject><subject>ROTATION</subject><subject>SILICON ON INSULATOR</subject><subject>SILICON-ON-INSULATOR SENSORS</subject><fulltext>true</fulltext><rsrctype>report</rsrctype><creationdate>2012</creationdate><recordtype>report</recordtype><sourceid>1RU</sourceid><recordid>eNqFi7sKAjEQAK-xEPUPLLbUIo2iaBn0fBTBItdLWPdwIWYlG1HBj_cKe2FgimH61ed0pxwKSwJpwXNklGQ6jkkfMRTJMPGn4xQcYxZTR8KSxRFeQ2IMEfxbC90UJq52fgr7dxZFuTOCp6TdHhQCNE8x9sUKFpEiZblRoTysem2ISqOfB9V4Vzebg7kUxrMWTlTOdmsXi_VstZz_yV8aYUMN</recordid><startdate>201204</startdate><enddate>201204</enddate><creator>Hudson, Tracy D</creator><creator>Kranz, Michael S</creator><scope>1RU</scope><scope>BHM</scope></search><sort><creationdate>201204</creationdate><title>Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer</title><author>Hudson, Tracy D ; Kranz, Michael S</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-dtic_stinet_ADA5592863</frbrgroupid><rsrctype>reports</rsrctype><prefilter>reports</prefilter><language>eng</language><creationdate>2012</creationdate><topic>ACCELEROMETERS</topic><topic>DETECTORS</topic><topic>GYROSCOPES</topic><topic>INERTIAL TECHNOLOGY</topic><topic>MICROELECTROMECHANICAL SYSTEMS</topic><topic>Navigation and Guidance</topic><topic>ROTATION</topic><topic>SILICON ON INSULATOR</topic><topic>SILICON-ON-INSULATOR SENSORS</topic><toplevel>online_resources</toplevel><creatorcontrib>Hudson, Tracy D</creatorcontrib><creatorcontrib>Kranz, Michael S</creatorcontrib><creatorcontrib>ARMY AVIATION AND MISSILE RESEARCH DEVELOPMENT AND ENG CTR REDSTONE ARSENAL AL WEAPONS SCIENCES DIRECTORATE</creatorcontrib><collection>DTIC Technical Reports</collection><collection>DTIC STINET</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hudson, Tracy D</au><au>Kranz, Michael S</au><aucorp>ARMY AVIATION AND MISSILE RESEARCH DEVELOPMENT AND ENG CTR REDSTONE ARSENAL AL WEAPONS SCIENCES DIRECTORATE</aucorp><format>book</format><genre>unknown</genre><ristype>RPRT</ristype><btitle>Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer</btitle><date>2012-04</date><risdate>2012</risdate><abstract>This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor.
Prepared in collaboration with ENGeniusMicro, LLC, Huntsville, AL. The original document contains color images.</abstract><oa>free_for_read</oa></addata></record> |
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| source | DTIC Technical Reports |
| subjects | ACCELEROMETERS DETECTORS GYROSCOPES INERTIAL TECHNOLOGY MICROELECTROMECHANICAL SYSTEMS Navigation and Guidance ROTATION SILICON ON INSULATOR SILICON-ON-INSULATOR SENSORS |
| title | Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer |
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