Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer

Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer

This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as...

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Bibliographische Detailangaben
Hauptverfasser: Hudson, Tracy D, Kranz, Michael S
Format: Report
Sprache:eng
Schlagworte:
ACCELEROMETERS
DETECTORS
GYROSCOPES
INERTIAL TECHNOLOGY
MICROELECTROMECHANICAL SYSTEMS
Navigation and Guidance
ROTATION
SILICON ON INSULATOR
SILICON-ON-INSULATOR SENSORS
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Beschreibung
Zusammenfassung:This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor. Prepared in collaboration with ENGeniusMicro, LLC, Huntsville, AL. The original document contains color images.