Laser Applications in Microelectronic and Optoelectronic Manufacturing V. Volume 3933, Held at San Jose, CA, on 24-26 January 2000

Laser Applications in Microelectronic and Optoelectronic Manufacturing V. Volume 3933, Held at San Jose, CA, on 24-26 January 2000

This proceedings contains papers on the following topics: fundamental processes of laser material interaction phenomenon, laser material processing techniques, pulsed-laser deposition, and laser microengineering. The latter topic was added to LAMOM V and reflects the strong growth in the application...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Helvajian, Henry, Sugioka, Koji, Gower, Malcolm C, Dubowski, Jan J
Format: Report
Sprache:eng
Schlagworte:
DEPOSITION
Electrooptical and Optoelectronic Devices
ELECTROOPTICS
LASER APPLICATIONS
Lasers and Masers
MANUFACTURING
Mfg & Industrial Eng & Control of Product Sys
MICROELECTRONICS
MICROMACHINING
MICROTEXTURING
PRODUCTION ENGINEERING
PULSED LASER DEPOSITION
PULSED LASERS
SYMPOSIA
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Beschreibung
Zusammenfassung:This proceedings contains papers on the following topics: fundamental processes of laser material interaction phenomenon, laser material processing techniques, pulsed-laser deposition, and laser microengineering. The latter topic was added to LAMOM V and reflects the strong growth in the application of lasers to micromachining, 3D fabrication, and microtexturing operations.