Low Temperature Growth of Thin Films by High Kinetic Energy Supersonic Molecular Beams

Low Temperature Growth of Thin Films by High Kinetic Energy Supersonic Molecular Beams

This grant initiated our work in low temperature deposition by supersonic jets. The attached draft manuscript details our work in growing GaAs thin films by jets of a single-source precursor and suggest that rapid growth and very smooth films can be attained. jg

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Bibliographische Detailangaben
Hauptverfasser: Mullins, Charles B, Sellidj, Abdelkrim
Format: Report
Sprache:eng
Schlagworte:
Crystallography
DEPOSITION
GALLIUM ARSENIDES
GROWTH(GENERAL)
HIGH RATE
Inorganic Chemistry
JET FLOW
KINETIC ENERGY
LOW TEMPERATURE
MOLECULAR BEAMS
Physical Chemistry
SINGLE SOURCE
Solid State Physics
SUPERSONIC FLOW
THIN FILMS
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Zusammenfassung:This grant initiated our work in low temperature deposition by supersonic jets. The attached draft manuscript details our work in growing GaAs thin films by jets of a single-source precursor and suggest that rapid growth and very smooth films can be attained. jg