In Situ Studies of Energy Deposition by Ion Beams

This report summarizes the results of initial surface acoustic wave studies on a variety of systems including lithium niobate (LiNbo3), quartz (Sio2), silicon on LiNbo3, silicon on Sio2 and silicon on sapphire, which have been subjected to ion implantation and to visible laser irradiation. In additi...

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Bibliographische Detailangaben
Hauptverfasser:	Budnick,J I, Lipschultz,F P, Namavar,F, Otter,F A, Grudkowski,T W
Format:	Report
Sprache:	eng
Schlagworte:	ACOUSTIC EQUIPMENT ALUMINUM BACKSCATTERING DAMAGE DEPOSITION DISTRIBUTION ENERGY Energy deposition ION BEAMS ION IMPLANTATION IRRADIATION LASER BEAMS LITHIUM NIOBATES MIXING NUCLEAR RESONANCE PROFILES QUARTZ SAPPHIRE SEMICONDUCTORS SILICON SILICON DIOXIDE Solid State Physics SURFACE ACOUSTIC WAVES SURFACES VISIBLE SPECTRA
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Beschreibung
Zusammenfassung:	This report summarizes the results of initial surface acoustic wave studies on a variety of systems including lithium niobate (LiNbo3), quartz (Sio2), silicon on LiNbo3, silicon on Sio2 and silicon on sapphire, which have been subjected to ion implantation and to visible laser irradiation. In addition, results of ion beam mixing studies on the Aluminum-Silicon system are reported, as well as the application of nuclear resonance profiling to a study of the near surface aluminum distribution in silicon. Keywords: Ion implantation; Ion beam mixing; Rutherford backscattering; Surface acoustic waves; Ion beam damage; Laser irradiation of surface acoustic wave system; Nuclear resonance profiling. (Author) Prepared in cooperation with United Technologies Research Center, East Hartford, CT.