Charge Transport and Polarization Effects in Dielectrics of MSI/LSI Devices

The purpose of the program was to investigate the magnitude and characteristics of the charge transfer and polarization that occur during an ionization pulse in typical oxide dielectrics used in MSI/LSI devices especially those used for passivation and separation of multilevel metalizations.

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Bibliographische Detailangaben
Hauptverfasser:	Leadon,Roland E, Snowden,Donald P
Format:	Report
Sprache:	eng
Schlagworte:	ALUMINATES CHARGE TRANSFER DIELECTRICS Electrical and Electronic Equipment GAMMA RAYS INTEGRATED CIRCUITS IRRADIATION Large scale integrated circuits Medium scale integrated circuits POLARIZATION RADIATION EFFECTS SILICON DIOXIDE
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Beschreibung
Zusammenfassung:	The purpose of the program was to investigate the magnitude and characteristics of the charge transfer and polarization that occur during an ionization pulse in typical oxide dielectrics used in MSI/LSI devices especially those used for passivation and separation of multilevel metalizations.