Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors

During the eighth quarter of this contract, significant achievements included initial evaluation of transistors for First Article Samples and improvements in transistor yield. Modifications to the E-beam machine and imaging procedure markedly improved definition and alignment of transistors.

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Bibliographische Detailangaben
Hauptverfasser:	Pankratz, John M, Creagh, Linda T, Varnell, Gilbert L
Format:	Report
Sprache:	eng
Schlagworte:	ALIGNMENT ALUMINUM BORIDES Electrical and Electronic Equipment ELECTRON BEAM MACHINES ELECTRON BEAMS ELECTRON IRRADIATION EPOXY RESINS Fabrication Metallurgy GLASS SEALS LANTHANUM COMPOUNDS LANTHANUM HEXABORIDE LITHOGRAPHY MANUFACTURING MASKING METALATION MICROWAVE EQUIPMENT PHOTOENGRAVING PHOTOLITHOGRAPHY Plastics PRODUCTION PRODUCTION ENGINEERING MEASURE SECONDARY EMISSION THERMAL STABILITY TRANSISTORS
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Beschreibung
Zusammenfassung:	During the eighth quarter of this contract, significant achievements included initial evaluation of transistors for First Article Samples and improvements in transistor yield. Modifications to the E-beam machine and imaging procedure markedly improved definition and alignment of transistors.