THIN-FILM CIRCUITS PRODUCT IMPROVEMENT

The report covers the mechanical redesign and modifications which were accomplished on the NAFI in-line vacuum deposition machine during the up-dating program in order to insure greater reliability of operation. It also covers the steps taken to improve the processes attending the fabrication of thi...

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Bibliographische Detailangaben
Hauptverfasser:	McGinley, John F, Patton, John H
Format:	Report
Sprache:	eng
Schlagworte:	Ceramics, Refractories and Glass CIRCUITS CONTROL SYSTEMS Electrical and Electronic Equipment GLASS MANUFACTURING MASKING PHOTOENGRAVING POSITIONING DEVICES(MACHINERY) SUBSTRATES THIN FILMS VACUUM APPARATUS VAPOR PLATING
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Beschreibung
Zusammenfassung:	The report covers the mechanical redesign and modifications which were accomplished on the NAFI in-line vacuum deposition machine during the up-dating program in order to insure greater reliability of operation. It also covers the steps taken to improve the processes attending the fabrication of thin-film circuitry on glass substrates in an effort to produce a more reliable product at an acceptable yield rate. (Author) See also Rept. no. NAFI-TR-835, AD-640 933.