PRESSURE MEASUREMENT IN THE 0.0001 TO 0.0000000001 TORR RANGE

PRESSURE MEASUREMENT IN THE 0.0001 TO 0.0000000001 TORR RANGE

The report documents the experimental results of pressure measurements made with a multiple orifice calibration system in the pressure range of 0.0004 to 0.0000000001 torr. The maximum reported error in the measurement of the pressure in the final chamber of the multiple orifice system is 11.2% when...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Mangold,Vernon L
Format: Report
Sprache:eng
Schlagworte:
CALIBRATION
DIFFUSION PUMPS
ERRORS
LOW PRESSURE
OPERATION
ORIFICES
PRESSURE GAGES
Test Facilities, Equipment and Methods
VACUUM
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Beschreibung
Zusammenfassung:The report documents the experimental results of pressure measurements made with a multiple orifice calibration system in the pressure range of 0.0004 to 0.0000000001 torr. The maximum reported error in the measurement of the pressure in the final chamber of the multiple orifice system is 11.2% when the pressure in the first chamber is referenced to a McLeod gauge which is used as a primary standard in the pressure range of 0.0004 to 0.00001 torr. The report includes discussions on calibration of vacuum gauges, measurement of small gas flows, error analysis in calculating pressures, vacuum gauge calibration report format, and procedures for calibrating a multiple orifice system. (Author)