ACTIVE THIN FILM CIRCUIT FUNCTIONS

The work performed in the first three quarters are reviewed which included efforts to produce single crystal films of silicon on polycrystal line ceramic substrates suitable for use in active circuit functions. It describes in more detail the work of the fourth quarter which has included some attemp...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Breckenridge, Robert G
Format:	Report
Sprache:	eng
Schlagworte:	CHEMICAL DEPOSITION GLASS OXIDES PYROLYSIS SILICON SUBSTRATES(ELECTRONIC) SUBSTRATES(ELECTRONICS) TANTALUM THIN FILM ELECTRONICS THIN FILMS TUNGSTEN
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