ACTIVE THIN FILM CIRCUIT FUNCTIONS
The work performed in the first three quarters are reviewed which included efforts to produce single crystal films of silicon on polycrystal line ceramic substrates suitable for use in active circuit functions. It describes in more detail the work of the fourth quarter which has included some attemp...
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| Format: | Report |
| Sprache: | eng |
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| Zusammenfassung: | The work performed in the first three quarters are reviewed which included efforts to produce single crystal films of silicon on polycrystal line ceramic substrates suitable for use in active circuit functions. It describes in more detail the work of the fourth quarter which has included some attempts at device fabrication. Finally, some of the significant results and con clusions arrived at are discussed and summarized. (Author) |
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