METHOD OF AUTOMATICALLY MEASURING SMALL DEVIATIONS IN PITCH OF DETAILS WITH PERIODIC STRUCTURES

METHOD OF AUTOMATICALLY MEASURING SMALL DEVIATIONS IN PITCH OF DETAILS WITH PERIODIC STRUCTURES

Trans. frrf Russian Patent Nr. 145011, (Appl. Nr. 696354/25, pp. 1-2, 6 Feb 1961.

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Zabolotskiy,V N
Format: Report
Sprache:eng
Schlagworte:
BEAMS(ELECTROMAGNETIC)
MEASUREMENT
PERIODIC STRUCTURES
STRUCTURES
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Zusammenfassung:Trans. frrf Russian Patent Nr. 145011, (Appl. Nr. 696354/25, pp. 1-2, 6 Feb 1961.