Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO3 Thin Films Annealed in Vacuum and Air Atmosphere

Perovskite-type La:BaSnO3 (LBSO) has been drawing considerable attention due to its high electron mobility and optical transparency. Its thin film electrical properties, however, remain inferior to those of single crystals. This work investigates the thermal post-treatment process of films deposited using the metalorganic chemical vapor deposition method to improve the electrical properties of different stoichiometry films, and demonstrates the modification of thin film’s structural properties using short and excessive annealing durations in vacuum conditions. Using vacuum post-treatment, we demonstrate the improvement of electrical properties in Ba-rich, near-stoichiometric, and Sn-rich samples with a maximum electron mobility of 116 cm2V−1s−1 at r.t. However, the improvement of electrical properties causes surface morphology and internal structural changes, which depend on thin film composition. At temperatures of 900 °C–1400 °C the volatile nature of LBSO constituting elements is described, which reveals possible deterioration mechanisms of thin LBSO air. At higher than 1200 °C, LBSO film’s decomposition rate increases exponentially. Thin film structure evolution and previously unreported decomposition is demonstrated by Ba and La diffusion to the substrate, and by evaporation of SnO-SnOx species.