Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application

Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application

MEMS sensors are currently undergoing a phase of exciting technological development, not only enabling advancements in traditional applications such as accelerometers and gyroscopes, but also in emerging applications such as microfluidics, thermoelectromechanical, and harsh environment sensors [...]...

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Veröffentlicht in:Micromachines (Basel) 2019-08, Vol.10 (9), p.554
1. Verfasser: Koley, Goutam
Format: Artikel
Sprache:eng
Schlagworte:
Accelerometers
Control algorithms
Design
Microelectromechanical systems
n/a
Noise
Sensors
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Beschreibung
Zusammenfassung:MEMS sensors are currently undergoing a phase of exciting technological development, not only enabling advancements in traditional applications such as accelerometers and gyroscopes, but also in emerging applications such as microfluidics, thermoelectromechanical, and harsh environment sensors [...].
ISSN:2072-666X
2072-666X
DOI:10.3390/mi10090554