Analysis of the Dynamic Sensitivity of Hemisphere-Shaped Electrostatic Sensors' Circular Array for Charged Particle Monitoring

Electrostatic sensor arrays (ESAs) are promising in industrial applications related to charged particle monitoring. Sensitivity is a fundamental and commonly-used sensing characteristic of an ESA. However, the usually used spatial sensitivity, which is called static sensitivity here, is not proper for moving particles or capable of reflecting array signal processing algorithms integrated in an ESA. Besides, reports on ESAs for intermittent particles are scarce yet, especially lacking suitable array signal processing algorithms. To solve the problems, the dynamic sensitivity of ESA is proposed, and a hemisphere-shaped electrostatic sensors' circular array (HSESCA) along with its application in intermittent particle monitoring are taken as an example. In detail, a sensing model of the HSESCA is built. On this basis, its array signals are analyzed; the dynamic sensitivity is thereupon defined by analyzing the processing of the array signals. Besides, a component extraction-based array signal processing algorithm for intermittent particles is proposed, and the corresponding dynamic sensitivity is analyzed quantitatively. Moreover, simulated and experimental results are discussed, which validate the accuracy of the models and the effectiveness of the relevant approaches. The proposed dynamic sensitivity of ESA, as well as the array signal processing algorithm are expected to provide references in modeling, designing and using ESAs.