Motion Control of Macro–Micro Linear Platform Based on Adaptive Fuzzy Active Disturbance Rejection Control

To ensure precise positioning of the macro–micro platform with a symmetrical structure, it is crucial to mitigate the impact of various perturbations, including disturbances, as well as complex factors such as external loads, electrical noise, and model parameter variations. This paper proposes a novel macro–micro master–slave control structure that incorporates adaptive fuzzy linear active disturbance rejection control (AFLADRC). The Kp and Kd parameters of the linear state error feedback (LSEF) are dynamically tuned and adjusted using fuzzy reasoning. This approach enhances the robustness of the system and simplifies the tuning process. In addition, this paper also analyzes the symmetry of the coupling effect between macro and micro, as the coupling will affect the motor force and the reaction potential of the motor. The macro–micro platform adopts a symmetric design; the macro stage is driven by a permanent magnet synchronous linear motor (PMLSM), and the micro stage is driven by a voice coil motor. Finally, we built the macro–micro linear motion experimental platform to verify the control effect of the proposed method by conducting trajectory tracking experiments and comparison experiments.