PRECISION MOTION SYSTEMS FOR EQUIPMENT OF ELECTRONIC TECHNICS MANUFACTURING

The basic scientific results of scientific research in the field of «Mechatronics and Microsystems»were briefly presented. The module concept of building of electromechanical converters for precision coordinate motion systems was described. The structure of adaptive control system was presented; it provides the possibility of trajectory control and dynamic programming of motion parameters, velocity and acceleration of drives. Mathematical models of analysis and synthesis of structural and topological, kinematic and dynamic characteristics of reconfigurable multicoordinate motion systems were shown; they may be also based on the parallel kinematic mechanisms.