Bidirectional Electromagnetically Induced Transparency Based on Coupling of Magnetic Dipole Modes in Amorphous Silicon Metasurface

A bidirectional electromagnetically induced transparency (EIT) arising from coupling of magnetic dipole modes is demonstrated numerically and experimentally based on nanoscale a-Si cuboid-bar metasurface. Analyzed by the finite-difference time-domain (FDTD) Solutions, both the bright and dark magnetic dipole mode is excited in the cuboid, while only the dark magnetic dipole mode is excited in the bar. By breaking the symmetry of the cuboid-bar structure, the destructive interference between bright and dark magnetic dipole modes is induced, resulting in the bidirectional EIT phenomenon. The position and amplitude of simulated EIT peak is adjusted by the vertical spacing and horizontal spacing. The EIT metasurface was fabricated by Electron-Beam Lithography and deep silicon etching technique on the a-Si film deposited by Plasma-Enhanced Chemical Vapor Deposition. Measured by a convergent spectrometer, the fabricated sample achieved a bidirectional EIT peak with transmission up to 65% and 63% under forward and backward incidence, respectively. Due to the enhanced magnetic field induced by the magnetic dipole resonance, the fabricated bidirectional EIT metasurface provides a potential way for magnetic sensing and magnetic nonlinearity.