Full‐field hard X‐ray nano‐tomography at SSRF

An in‐house designed transmission X‐ray microscopy (TXM) instrument has been developed and commissioned at beamline BL18B of the Shanghai Synchrotron Radiation Facility (SSRF). BL18B is a hard (5–14 keV) X‐ray bending‐magnet beamline recently built with sub‐20 nm spatial resolution in TXM. There are two kinds of resolution mode: one based on using a high‐resolution‐based scintillator‐lens‐coupled camera, and the other on using a medium‐resolution‐based X‐ray sCMOS camera. Here, a demonstration of full‐field hard X‐ray nano‐tomography for high‐Z material samples (e.g. Au particles, battery particles) and low‐Z material samples (e.g. SiO2 powders) is presented for both resolution modes. Sub‐50 nm to 100 nm resolution in three dimensions (3D) has been achieved. These results represent the ability of 3D non‐destructive characterization with nano‐scale spatial resolution for scientific applications in many research fields. A demonstration of full‐field hard X‐ray nano‐tomography for high‐ and low‐Z material samples is presented for the two TXM resolution modes developed at beamline BL18B at SSRF.